Canyon Materials, Inc. - Calibration Plates

Canyon Materials, Inc. - Calibration Plates

Calibration Plate HEBS5 (continued)

Diagram 1. Layout of via test pattern in Part III

Table I. OD ranges with each row in Part III

Row	Minimum OD	Maximum OD
1	0.223	0.823
2	0.223	1.023
3	0.223	1.223
4	0.223	1.423
5	0.223	1.523
6	0.400	1.400
7	0.532	1.132
8	0.532	1.332
9	0.532	1.532

Table II. OD Values for constant delta T of Part III

Layer	Row 1	Row 2	Row 3	Row 4	Row 5	Row 6	Row 7	Row 8	Row 9
1	0.823	1.023	1.223	1.423	1.523	1.400	1.132	1.332	1.532
2	0.760	0.916	1.055	1.172	1.223	1.232	1.069	1.225	1.364
3	0.704	0.830	0.934	1.014	1.047	1.111	1.013	1.139	1.243
4	0.655	0.759	0.839	0.899	0.922	1.016	0.964	1.068	1.148
5	0.611	0.697	0.761	0.807	0.825	0.938	0.920	1.006	1.070
6	0.571	0.643	0.696	0.732	0.746	0.873	0.880	0.952	1.005
7	0.535	0.595	0.638	0.668	0.679	0.815	0.844	0.904	0.947
8	0.501	0.552	0.588	0.612	0.621	0.765	0.810	0.861	0.897
9	0.470	0.513	0.543	0.563	0.570	0.720	0.779	0.822	0.852
10	0.441	0.477	0.502	0.518	0.524	0.679	0.750	0.786	0.811
11	0.413	0.444	0.464	0.478	0.483	0.641	0.722	0.753	0.773
12	0.387	0.413	0.430	0.441	0.445	0.607	0.696	0.722	0.739
13	0.363	0.384	0.398	0.407	0.410	0.575	0.672	0.693	0.707
14	0.340	0.357	0.368	0.375	0.378	0.545	0.649	0.666	0.677
15	0.318	0.332	0.340	0.346	0.348	0.517	0.627	0.641	0.649
16	0.298	0.308	0.314	0.318	0.320	0.491	0.607	0.617	0.623
17	0.278	0.285	0.290	0.293	0.294	0.467	0.587	0.594	0.599
18	0.259	0.263	0.266	0.268	0.269	0.443	0.568	0.572	0.575
19	0.240	0.243	0.244	0.245	0.245	0.421	0.549	0.552	0.553
20	0.223	0.223	0.223	0.223	0.223	0.400	0.532	0.532	0.532

Table III. Dimensions of via structures within a column of Part III

Column	Via Gap (m m)	Via Width (m m)
1	10	20
2	20	20
3	2	20
4	5	20
5	10	40
6	20	40
7	2	40
8	5	40
9	10	60

Diagram 2. Cross-section of a via in Part III

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