Canyon Materials, Inc. - Technology













A Short List of Publications on

HEBS-Glass and LDW Glass Gray Scale Photomasks

    1.
    The 1997 Photonics Circle of Excellence Award Winner: HEBS-Glass Photomask Blanks of Canyon Materials, Inc., Photonics Spectra, May 1997, page 100.
    2.
    "Direct Write All Glass Photomask Blanks," U.S. Patent No. 6,562,523 B1 by Chuck Che-Kuang Wu and Laurie Ann Wu, May 13, 2003.
    3.
    "Gray Scale All Glass Photomasks," U.S. Patent No. 6,524,756 by Chuck Che-Kuang Wu, February 25, 2003.
    4.
    "High fill-factor avalanche photodetectors for near-intrared free-space photonic networks" by S.K. Lohokare, Dennis W. Prather, Thomas Dillon, Anita Sure, Oleg V. Sulima, Jeffrey A. Cox, and Michael G. Mauk, in J. Microlith., Microfab., Microsyst., Vol. 2, No. 4, pp. 319-330, Oct. 2003.
    5.
    "General aspheric refractive micro-optics fabricated by optical lithography using a high energy beam sensitive glass gray-level mask" by Walter Daschner, Pin Long, Robert Stein, Chuck Wu, and S.H. Lee in J. Vac. Sci. Technol. B 14(6), pp. 3730-3733, Nov/Dec 1996.
    6.
    "Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass" by Walter Daschner, Pin Long, Chuck Wu, and S. H. Lee in Applied Optics, Vol. 36, No. 20, pp. 4675-4680, 10 July 1997.
    7.
    "Beam shaping elements for holographic application" by E.-Bernhard Kley, Matthias Cumme, Lars Wittig, Mike Thieme and Werner Gabler, in Proceeding of SPIE, Vol. 4179, pp. 58-64, 2000.
    8.
    "Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass" by Christiane Gimkiewicz, Detlev Hagedorn, Jorgen Jahns, Ernst-Bernhard Kley and Frank Thoma, in Applied Optics, Vol. 38, No. 14, pp. 2986-2990, May 1999.
    9.
    "Fabrication of micro optical surface profiles by using gray scale masks" by E.-B. Kley, F. Thoma, U.D. Zeitner, L. Wittig and H. Aagedal, in SPIE, Vol. 3276, pp. 254-262, 1998.
    10.
    "Fabrication and properties of refractive micro optical beam shaping" by E.-Bernhard Kley, Lars-Chr. Wittig, Matthias Cumme, Uwe D. Zeitner, Peter Dannberg, in SPIE, Vol. 3879, pp. 20-31, 1999.
    11.
    "Design and fabrication of diffractive optical elements by use of gray-scale photolithography" by Jin-Seung Sohn, Myung-Bok Lee, Wan-Chin Kim, Eun-Hyung Cho, Tae-Wan Kim, Chan-Young Yoon, No-Cheol Park, and Young-Pil Park, in Applied Optics, Vol. 44, No. 4, February 1, 2005.
    12.
    "Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale make" by X.-C. Yuan, W. X. Yu, N. Q. Ngo and W.C. Cheong, in Optics Express, Vol. 10, No.7, pp. 303-308, April 2002.
    13.
    "Microlens and micromirror for optical MEMS fabricated by e-beam photolithography and ICP etching" by Chii-Chang Chen, Chien-Chieh Lee, J.Y. Cheng, Y.L. Huang, Chih-Yang Chang, Ming-Hung Li, Ya-Shih Huang, Lin-Yu Chien, Jenq-Yang Chang, Gou-Chung Chi, Wei-Tai Cheng, Jui-Hung Yeh and Chuck Wu, Taipei, Taiwan, OC2002, April 2002.
    14.
    "Vertical adiabatic transition between a silica planar waveguide and an electro-optic polymer fabricated with gray-scale lithography" by Daniel H. Chang, Talal Azfar, Seong-Ku Kim and Harold R. Fetterman, in Optics Letters, Vol. 28, No. 11, June 2003.
    15.
    "Design and fabrication of refractive microlenses" by Gregory R. Brady, a master thesis from Department of Electrical and Computer Engineering, McGill University, Montreal, Canada, July 2000.
    16.
    "Multilevel diffractive microlens fabrication by one-step laser assisted chemical etching upon high-energy-beam sensitive glass" by Michael R. Wang and Heng Su, in Optics Letters, Vol. 23, No. 11, pp. 876-878, June 1998.
    17.
    "Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication" by Michael R. Wang and Heng Su, in Applied Optics, Vol. 37, No. 32, pp. 7568-7576, November 1998.
    18.
    "High-efficiency flat-top beam shaper fabricated by a nonlithographic technique" by Xu Guang Huang, Michael R. Wnag, and Changyuan Tu, in Opt. Eng. 38 (2), pp. 208-213, February 1999.
    19.
    "Subwavelength-resolvable focused non-Gaussian beam shaped with a binary diffractive optical element" by Michael R. Wang and Xu Guang Huang in Applied Optics, vol. 38, No. 11, pp. 2171-2176, April 1999.
    20.
    "Gratings in GaN Membranes" by Chii-Chang Chen, Chia-Hung Hou, Jinn-Kong Sheu, Jenq-Yang Chang, Ming-Hung Li, Gou-Chung Chi, and Chuck Wu, in Japanese Journal of Applied Physics, Vol. 43, No. 8B, pp. 5854-5856, August 25, 2004.
    21.
    "Fabrication of gray-scale masks and diffractive optical elements with LDW glass" by V.P. Korolkov, A. I. Malyshev, A. G. Poleshchuck, V. V. Cherksshin, H. J. Tiziani, C. Pruss, T. Schoder, J. Westhauser, and Chuck Wu, in Lithographic and Micro-achining Techniques for Optical Component Fabrication, E. B. Kley and H. P. Herzig, eds., Proc. SPIE 4440, pp. 73-84, 2001.


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