Canyon Materials, Inc. - Calibration Plates














Calibration Plate I85


 The Calibration Plate I85 B (5"x5") is a mask made of HEBS-glass and written with test patterns useful for calibrating photoresist thickness vs. mask optical density (OD).  The mask is written with an e-beam writer with a 0.1 µm addressing grid size and consists of the following three parts: 
 

Part I: This part helps users to match photoresist heights with specific optical densities in the mask to build a calibration curve.  The pattern exhibits 200 gray levels that are identified with labels of (i + 1), ranging from 1 to 200.  Each gray level consists of 3 test strips, each test strip being 204.8µm x 819.2µm in size.  The gray levels are designated optical density values according to the equation D = 0.152 + 0.009286i, where i = 0, 1, 2 . . . 199.  Thus, by using the equation, the minimum and maximum OD can be determined to be 0.152 and 2.0 respectively.
Part II: This section can be utilized to determine the number of gray levels needed to fabricate a smooth surface figure for a 3-dimensional micro-device.  The pattern consists of two sets of 31 gratings, one set of 31 gratings having a constant delta T between adjacent gray levels and the other with constant delta OD, where OD = D = log (1/T) and T is transmittance.  The OD range of each of the 62 gratings is 0.12 to 1.12.  As the width of a grating pitch increases from 2µm to 500µm, the number of gray levels is increased from 10 to 20 to 100.  The two sets of 31 gratings are divided into the following 6 groups:
Group1: 19 blaze gratings having periods of 2µm, 3µmů to 20µm:  Each grating has 10 periods, and has 10 gray levels in each period.  T = 0.759 - 0.0759i, where i = 0, 1, 2 . . . . . 9.  This range in transmission values corresponds to an OD range of 0.12 to 1.12.
Group 2: 6 blaze gratings having periods of 10µm, 20µmů to 60µm:  Each grating has 4 periods, and has 20 gray levels in each period.  T = 0.759 - 0.03595i, where i = 0, 1, 2 . . . . . 19.  This range in transmission values corresponds to an OD range of 0.12 to 1.12.
Group 3: 6 blaze gratings having periods of 50µm, 100µm, 200µm, 300µm, 400µm, and 500µm:  Each grating has 4 periods, and has 100 gray levels in each period. T = 0.759 - 0.0069i, where i = 0, 1, 2 . . . . . 99. This range in transmission values corresponds to an OD range of 0.12 to 1.12.
Group 4: 19 blaze gratings having periods of 2µm, 3µmů to 20µm:  Each grating has 10 periods, and has 10 gray levels in each period.  D = 0.12 + 0.111i, where i = 0, 1, 2 . . . . . 9.
Next page


Back to CMI Home
Company | Technology | Products | Online Help | Contact