DOE Fabrication: 3D Shaping
One LDW-glass Mask
One Optical Exposure to Make DOEs
No Mask Overlay Errors
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Results:
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One mask, one photolithographic step, no mask overlay
errors.
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One step fabrication of a true gray level mask.
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Phase levels of DOE are immediately visible as gray
levels in LDW-glass upon laser beam exposure.
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One gray level mask replaces 5 binary masks.
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No resist processing, no chrome etching, further reduced
cost of mask.
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High DOE efficiency, because;
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Sharp zone boundaries are realized using laser beam
direct write on LDW-glass which has no graininess, moreover, focused laser
spot size in LDW-glass is smaller than the spot size in air.
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Smooth continuous blaze surfaces are realized.
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One step 3D photolithography replaces multi-step binary
photolithography.
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Cost savings from cutting DOE fabrication steps.
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Faster turnaround.
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