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Patented glass product of Canyon Materials, Inc.; unlike halftone masks such as chrome masks that rely on varying pinhole density, HEBS-glass mask is the only true gray scale photomask
An e-beam sensitive surface glass layer being 1 micron thick; predetermined gray levels are obtained by e-beam exposure of this layer to a range of dosage (beam current x dwell time)
High resolution; 0.1 micron per gray level
Wide range of gray tones (>500 gray levels)
Ease of use in both contact or projection mode without any special requirements
Optical density range of the gray levels is 0.1 to 4
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