Canyon Materials, Inc. - HEBS Glass Gray Scale Lithography














All-Glass Gray Scale Photolithography



  • Broadens the range of applications of photoresist-based refractive and diffractive micro-optics fabrication


  • Enables the fabrication of precision and arbitrary shaped micro-optics and other 3D microstructures (including optical MEMS)


  • Enables fabrication of microstructures such as microlens arrays to better than one tenth of a wavelength accuracy of surface profile of each lenslet. Each lenslet in the array may have a unique design.



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