Useful spectral transmission | 350 nm to 2500 nm |
Optical density of LDW-HR plates |
Type I | Type II | Type III |
436 nm | 1.4 | 2.4 | 3.0 |
405 nm | 1.2 | 2.0 | 2.7 |
365 nm | 1.0 | 1.6 | 2.0 |
514 nm | 1.5 | 2.7 | 3.0 |
632 nm | 0.8 | 1.8 | 2.8 |
647 nm | 0.7 | 1.6 | 2.6 |
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Optical density of LDW-IR plates |
Type I | Type II | Type III |
436 nm | 1.2 | 1.8 | 2.6 |
405 nm | 1.2 | 1.8 | 2.4 |
365 nm | 1.4 | 1.8 | 2.1 |
514 nm | 1.4 | 2.8 | >3.0 |
632 nm | 0.5 | 1.1 | 1.8 |
|
Standard LDW Plates |
LDW Gray (as of 10/1/2000) Optical density is nearly a constant value of 1.0 from 350 nm to 700 nm |
Special Ordered Plates |
User specifies the required optical density at the wavelength of lithographic exposure tool. |
Pinhole Density |
Zero pinholes/cm² |
Refractive index nd |
1.54197 |
Dispersion vd |
51.02 |
Humidity Coefficient of Expansion |
Zero |
Thermal Coefficient of Expansion |
3.6 x 10-6cm per cm per degree F |
Storage Mask (i.e., exposed plate) |
Normal room temperature or below, not effected by humidity levels from 0 to 100% |
Storage Blank (i.e., unexposed plate) |
Normal room temperature below, not effected by humidity levels from 0 to 100% |
Maximum use temperature |
120° F |
Safe light Mask |
Normal room lighting |
Safe Light Blank |
Normal room lighting |
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Plate sizes |
2.5" x 2.5" x 0.090"
3" x 3" x 0.120"
5" x 5" x 0.090"
6" x 6" x 0.120"
|
Size tolerance |
>+0.000/-0.003" |
Thickness tolerance |
±0.005" |
Flatness of Standard LDW plates Standard Flat Precision Flat |
<1.3 µm per inch of diagonal <0.6 µm per inch of diagonal |
Glass Quality |
Highest internal quality with respect to freedom from tiny random inclusions called seeds or blisters. |
Surface Quality |
Fine polished to free from scratches, digs and abrasions. |
Procedure of Cleaning Plates |
Wash and scrub with detergent in water using a soft sponge, rinse with DI water jet spray, then spin dry or solvent dry. To remove stubbornly adhering contamination, plates can be soaked or scrubbed with any solvent or acid except HF before the above wash cycle. |
Ultrasonic cleaning |
Not recommended |
Resolution Grain size of coloring speck of silver in glass. Minimum feature size |
Limited only by the focused laser spot size recorded in LDW-glass, which is smaller than the laser spot size in air, due to an intensity threshold effect. |
Writing energy density for 2 to 4 full erasure in one laser sweep. |
2 to 4 joule/cm²(See text for more detail) |
Developing or fixing |
None; visible image upon laser beam exposure |
Microscope inspection of pattern data |
Transmission mode only, image does not reflect or scatter light |
Patented: LDW-glass is made under various U.S. and International patents owned by Canyon Materials, Inc.
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