Canyon Materials, Inc. - LDW Glass














LDW Glass


LDW-GLASS PHOTOMASK BLANKS

Phase Levels of DOE are immediately Visible as Gray Levels in LDW-Glass Upon Laser Beam Exposure

Specifications

Useful spectral transmission350 nm to 2500 nm
Optical density of LDW-HR plates Type IType IIType III
436 nm1.42.43.0
405 nm1.22.02.7
365 nm1.01.62.0
514 nm1.52.73.0
632 nm0.81.82.8
647 nm0.71.62.6
Optical density of LDW-IR plates Type IType IIType III
436 nm1.21.82.6
405 nm1.21.82.4
365 nm1.41.82.1
514 nm1.42.8>3.0
632 nm0.51.11.8
Standard LDW Plates LDW Gray (as of 10/1/2000)
Optical density is nearly a constant value of 1.0 from 350 nm to 700 nm
Special Ordered Plates User specifies the required optical density at the wavelength of lithographic exposure tool.
Pinhole Density Zero pinholes/cm²
Refractive index nd 1.54197
Dispersion vd 51.02
Humidity Coefficient of Expansion Zero
Thermal Coefficient of Expansion 3.6 x 10-6cm per cm per degree F
Storage
Mask (i.e., exposed plate)
Normal room temperature or below, not effected by humidity levels from 0 to 100%
Storage
Blank (i.e., unexposed plate)
Normal room temperature below, not effected by humidity levels from 0 to 100%
Maximum use temperature 120° F
Safe light
Mask
Normal room lighting
Safe Light
Blank
Normal room lighting
Plate sizes 2.5" x 2.5" x 0.090"
3" x 3" x 0.120"
5" x 5" x 0.090"
6" x 6" x 0.120"
Size tolerance >+0.000/-0.003"
Thickness tolerance ±0.005"
Flatness of Standard LDW plates
Standard Flat
Precision Flat

<1.3 µm per inch of diagonal
<0.6 µm per inch of diagonal
Glass Quality Highest internal quality with respect to freedom from tiny random inclusions called seeds or blisters.
Surface Quality Fine polished to free from scratches, digs and abrasions.
Procedure of Cleaning Plates Wash and scrub with detergent in water using a soft sponge, rinse with DI water jet spray, then spin dry or solvent dry. To remove stubbornly adhering contamination, plates can be soaked or scrubbed with any solvent or acid except HF before the above wash cycle.
Ultrasonic cleaning Not recommended
Resolution
Grain size of coloring speck of silver in glass.
Minimum feature size
Limited only by the focused laser spot size recorded in LDW-glass, which is smaller than the laser spot size in air, due to an intensity threshold effect.
Writing energy density for 2 to 4 full erasure in one laser sweep. 2 to 4 joule/cm²(See text for more detail)
Developing or fixing None; visible image upon laser beam exposure
Microscope inspection of pattern data Transmission mode only, image does not reflect or scatter light

Patented: LDW-glass is made under various U.S. and International patents owned by Canyon Materials, Inc.

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