High Energy Beam Sensitive (HEBS) Glass
Patented glass products of Canyon Materials, Inc. (see U.S. Patent No. 6,524,756B1, No. 6,562,523B1 and No. 5,078,771); unlike halftone masks such as chrome masks that rely on varying pinhole density, LDW-glass and HEBS-glass masks are the true gray scale photomasks.
Predetermined gray levels are obtained by beam exposure of a surface glass layer to a range of dosage (beam current x dwell time).
High resolution; 0.1 micron per gray level.
Wide range of gray tones (>500 gray levels).
Conventional contact aligners and projection printers are used without any special requirements.
Continuous optical density values of the gray levels range from less than 0.1 to more than 2.0.
Optical density values up to 8 are available in custom ordered plates.
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